photolithographic process
- photolithographic process
- fotolitografavimas
statusas T sritis radioelektronika
atitikmenys: angl. photolithographic process
vok. fotolithografischer Prozeß, m
rus. проведение фотолитографии, n; фотолитографический процесс, m
pranc. réalisation de photolithographie, f
Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“.
Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas.
2000.
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